IC200TBX464
【廈門(mén)莫格電氣自動(dòng)化有限公司】
:雷琳(銷(xiāo)售工程師) 電 話 :/
:1982497648 :
郵 箱:1982497648 傳 真:(請(qǐng)備注雷琳收)
公司主營(yíng)產(chǎn)品,優(yōu)勢(shì)供應(yīng),充足庫(kù)存:
Bently Nevada(本特利):3500系統(tǒng)/3300系統(tǒng),前置器探頭等
德國(guó)EPRO MMS6000系統(tǒng)卡件 MMS3000系統(tǒng)卡件 PR6422 PR6423 PR6424 PR6426 PR9268等系列探頭前置器備件。
ABB PLC系統(tǒng)模塊 DCS系統(tǒng)卡件,包括一些停產(chǎn)的控制系統(tǒng)模塊卡件。
GE燃機(jī)卡件IS200系列,DS200系列
Rockwell Allen-Bradley: SLC500/1747/1746、 MicroLogix/1761/1763/1762/1766/1764、
CompactLogix/1769/1768、
Logix5000/1756/1789/1794/1760/1788、PLC-5/1771/1785等。
Invensys Foxboro(??怂共_):I/A Series系統(tǒng),F(xiàn)BM(現(xiàn)場(chǎng)輸入/輸出模塊)順序控制、梯形邏輯控制、事故追憶處理、數(shù)模轉(zhuǎn)換、輸入/輸出信號(hào)處理、數(shù)據(jù)通信及處理等。
Invensys Triconex: 冗余容錯(cuò)控制系統(tǒng)、基于三重模件冗余(TMR)結(jié)構(gòu)的zui現(xiàn)代化的容錯(cuò)控制器。
Westinghouse(西屋): OVATION系統(tǒng)、WDPF系統(tǒng)、WEStation系統(tǒng)備件。
Schneider Modicon(施耐德*康):Quantum 140系列處理器、控制卡、電源模塊等。
ABB:工業(yè)機(jī)器人備件DSQC系列、Bailey INFI 90等。
Siemens(西門(mén)子):Siemens MOORE, 6ES5系列,6GK系列,6DD系列,6AR系列。
Motorola(摩托羅拉):MVME 162、MVME 167、MVME1772、MVME177等系列。
XYCOM:I/O 、VME板和處理器等。
GE FANUC(GE發(fā)那科):模塊、卡件、驅(qū)動(dòng)器等各類(lèi)備件,IC693,IC695,IC697 IC698等系列。
Yaskawa(安川):伺服控制器、伺服馬達(dá)、伺服驅(qū)動(dòng)器。
Bosch Rexroth(博世力士樂(lè)):Indramat,I/O模塊,PLC控制器,驅(qū)動(dòng)模塊等。
Woodward(伍德沃德):SPC閥位控制器、PEAK150數(shù)字控制器。
Rosemount羅斯蒙特:壓力變送器、流量計(jì)。
系統(tǒng)說(shuō)明
控制器工作前,安全檢測(cè)電路對(duì)三相電源進(jìn)行檢測(cè),如出現(xiàn)錯(cuò)相、缺相、嚴(yán)重相壓不平衡、供電電壓過(guò)低或反饋線斷路等,控制器不工作。
控制器具有延時(shí)功能,防止操作人員快速點(diǎn)動(dòng)操作,保證平穩(wěn)的加速和減速,防止對(duì)電機(jī)和減速機(jī)的沖擊。在兩個(gè)運(yùn)動(dòng)方向上均設(shè)四檔速度,10%、20%、30%,當(dāng)選擇四檔*速度時(shí),電機(jī)沿斜坡曲線加速到全速。
對(duì)起升機(jī)構(gòu),有兩個(gè)加速接觸器,分別在50%速度(25Hz),75%速度(12.5Hz)時(shí)接通,以平穩(wěn)加速到全速,加速過(guò)程中切換時(shí)的峰值電流限制在滿載電流的兩倍。當(dāng)電機(jī)超載時(shí),加速接觸器立即釋放,防止電機(jī)嚴(yán)重超載。
起升機(jī)構(gòu)運(yùn)行:當(dāng)主令控制器選IC200TBX464擇起升某一擋位時(shí),上升接觸器接通,電機(jī)得電,制動(dòng)器打開(kāi),電機(jī)起動(dòng)。通過(guò)轉(zhuǎn)子信號(hào)與控制器給定信號(hào)綜合,QTD控制器自動(dòng)進(jìn)入閉環(huán)控制狀態(tài),在給定的速度下運(yùn)行,主令控制器從任何檔位回零時(shí),制動(dòng)器先制動(dòng),電機(jī)斷電,抱閘停車(chē)。
重載下降:當(dāng)主令控制器選擇下降某一擋位時(shí),首先上升接觸器接通,電機(jī)產(chǎn)生上升力矩,制動(dòng)器打開(kāi),電機(jī)起動(dòng),在重力作用下重物下降,QTD控制器在閉環(huán)狀態(tài)下以給定的速度穩(wěn)定運(yùn)行。主令控制器選擇全速檔位時(shí),下降接觸器接通,此時(shí)電機(jī)處于再生發(fā)電狀態(tài)全速下降,當(dāng)主令控制器從下降全速檔回到慢速檔時(shí),經(jīng)100ms延時(shí)下降接觸器釋放上升接觸器接通,在反接力矩作用下,電機(jī)減速并進(jìn)入閉環(huán)控制狀態(tài)。
無(wú)論在任何運(yùn)行狀態(tài)下,一旦主令控制器回到零位,控制器以反接力矩進(jìn)行制動(dòng),電機(jī)立即減速,達(dá)到靜止?fàn)顟B(tài)后,制動(dòng)器制動(dòng),經(jīng)0.6s延時(shí)電機(jī)斷電停止運(yùn)行,如電制動(dòng)時(shí)間超過(guò)1S,不管電機(jī)是否達(dá)到靜止?fàn)顟B(tài)制動(dòng)器將進(jìn)行機(jī)械制動(dòng)。
輕載下降:輕載下降與重載下降一樣,首先上升接觸器接通,給電機(jī)施加一定的反接力矩,如果負(fù)載太輕,電機(jī)不動(dòng)或下降速度極慢,系統(tǒng)判斷負(fù)載過(guò)輕,此時(shí)上升接觸器釋放,下降接觸器接通,此時(shí)電機(jī)將以再生發(fā)電狀態(tài)下降。當(dāng)實(shí)際速度超過(guò)給定速度值時(shí),系統(tǒng)自動(dòng)進(jìn)入反接制動(dòng)狀態(tài),當(dāng)負(fù)載處于臨界狀態(tài)時(shí),上升下降接觸器出現(xiàn)多次判斷,然后穩(wěn)定運(yùn)行。
平移: 當(dāng)起重機(jī)平移機(jī)構(gòu)運(yùn)行時(shí),主令控制器給任何檔位,系統(tǒng)將在這一速度上穩(wěn)定運(yùn)行;當(dāng)主令控制器回零位時(shí),反接制動(dòng)工作,反接制動(dòng)時(shí)間由速度慣性決定。
五、結(jié)束語(yǔ)
經(jīng)過(guò)半年的持續(xù)改造,本公司所有行車(chē)都順利改造為數(shù)字式調(diào)壓調(diào)速系統(tǒng),本系統(tǒng)投入使用后設(shè)備運(yùn)行平穩(wěn),消除了舊系統(tǒng)維護(hù)量大、操作僵硬、控制精度不高等缺點(diǎn),維護(hù)量大大降低,設(shè)備使用率明顯提高,改造后的系統(tǒng)基本不須維護(hù),并且能適應(yīng)鋼鐵企業(yè)的惡劣環(huán)境,即使出現(xiàn)設(shè)備問(wèn)題,也有相關(guān)的報(bào)警指示,并可迅速對(duì)相應(yīng)模塊進(jìn)行更換,不造成影響時(shí)間,同時(shí)公*慮到人員不足及不同國(guó)家員工的技能差異,采取了‘合二為一’的管理方式,即行車(chē)的操作和維護(hù)由同一個(gè)人承擔(dān),即誰(shuí)操作誰(shuí)維護(hù),只需開(kāi)始上崗前對(duì)員工進(jìn)行設(shè)備和操作方面的培訓(xùn),即可勝任這項(xiàng)工作。通過(guò)近半年來(lái)的使用,深受海外工業(yè)人士的歡迎,已接待過(guò)2批工程管理人員到現(xiàn)場(chǎng)參觀行車(chē),由于它的易維護(hù)性、成本造價(jià)低廉、操作靈活,有幾家企業(yè)的行車(chē)采用此系統(tǒng),設(shè)備正在改造當(dāng)中
WJ999/ 1000, 085575-000 , PLC,MODULE,16PO?INT,INPUT,24VA
AMAT 0010-09340
Brooks TEACH PENDANT,BROOKS, 27-10354-00, 001-1987
19-00267-01 ,Concept One, C-Type, Rotation, NOVELLUS PA
Novellus 27-00184-00, Head, PMT Detector, VERITY PM100
WJ999/1000, GE Faunc IIC693PWR321R / 085573-000/ PLC,MO
WJ999/1000, GE Faunc IC693MDL655D / 085569-000/ PLC,MO
LSA ANODIC Technology 04-732006-01
LSA ANODIC Technology 10-114729-00
LSA ANODIC Technology 00-677831-02
Trazar ECC1-1 / Power Supply, ESC, Improved DC Offset
674494-01, Varian , Spring, Sheild Retainer 3180
LSA ANODIC Technology 04-733006-01 , Spacer Effector
AMAT 0190-14235, SETRA 264 Pressure Transducer
Novellus 300mm Vector Spindle Assembly 02-324753-00 , W
AMAT 0010-76155 DC POWER SUPPY PRECISION 5000, P5000
WJ 999/ 1000 , CARD,CONTROLLER?,SERVO,MOTOR,2 AX / 08589
Novellus 02-030005-00, ,ASSY,Light Tower, Powersupply
MKS Cal-Weld T-Valve, 10-053162-00
AL BLANK, For shopping Purposes only
WJ999/ 1000, 903169-001 , CARD,REGULATOR,?MFC,952- APL
Varian 00-677815-01
FSI 931044-001
WJ999/ 1000, 980758-001 , CARD,INPUT/OUTP?UT,STANDARD
WJ999/ 1000, 902469-001, CARD,OUTPUT,951?- CIRCUIT CARD
WJ999/ 1000, 905920-001, CARD,INTERFACE,?TEMPERATURE,RES?
F24069CA, UF3000 Prober, Top plate Docking ring
AXCELIS 17B5402
AMAT P5000 CLEANROOM 8INCH ROBOT 0010-76015 / 515-LL
AMAT CHAMBER ASSY / LAMP MOULE / THROTTLE V/V ASSY / P
NOVELLUS TUBE ASSY,H-PIECE,3/?8, 10-116652-01
19-00267-01 MOTOR,CX57-51, ROT, MOD-HIFLEX , NOVELLUS P
WJ999/ 1000, 910402-001 , CARD,INPUT,TC48?6- APL
WJ 999/ 1000 , MKS 223B-13364 /TRANSDUCER,PRE?SSURE,0-2
WJ999/1000, GE Faunc IC693MDL752C / 085577-000 / PLC,M
WJ999/1000, GE Faunc IIC693MDL940C / 085574-000 / PLC
MAGNETRON;3S38-?000099-12,MAGNE?TRON..YJ16
AMAT 0010-09341, WAFER LIFT PRECISION 5000
AMAT P5000 Loadlock chamber Assy / 0010-70064 / Eleva
NOVELLUS NS240024/M, 27-10133-00, Power Supply, 19.2-2
Amat 0100-09029
Brooks 002-9401-01
LSA ANODIC Technology 04-732008-01
AMAT 0190-01965
AMAT 0010-76001
Nozzle Insert DG Solid 300mm, 1843
AMAT 0040-54690, CYLINDER BASE, SLIT VAVLE DOOR, AXIOM
Corman Technologies CT-N806 (NIB) CorNet ARCNET Diagnos
UOT249105, ROTATION AXIS REPAIR
BROOKS 370120 / YEA06033 GAUGE-ION TYPE:EXT-Y
Nanometrics 9407-030998,Lam?p Housing Ellipsmoetry Solut
AMAT, 0090-A6352 WHC ASSY,G3/GX
VARIAN E15006750 BOARD-PCB INTERFACE I/O
ADVANCED ENERGY 1344017-00, PIN, CONNECTOR/CA-79?BR
SKT-5 , Drypump I/O Connector Cable
AMAT 0190-28672 / UAPM22925RSN-05?4 HEATED JACKET
AMAT 0021-19342
7021002P001, E-904SAETW-1200?
AXCELIS 17270120
NOVELLUS 71-254022-00
Lam Research 678-099961-001, HEATER MKS 9515-0143, HTR1
AMAT 3140-01141 BSHG TAPER-LOCK 2517 55MM BORE
Lam Research 678-099961-001, HEATER, MKS 9515-0143, HTR
VARIAN CYLINDER, 2799965100
WJ 999/ 1000, 909457-001, BAFFLE,MAIN,100?0,-WPL
MOTOR-SERVO, SGMCS-08 DDA-TE14 CT5040-000049-1?1, YASKA
WJ999/1000, 912086-001 / SENSOR,HEATER,I?NFRARED,ASSY- A
WJ 999/ 1000 , WAFER,PROFILING?,5",1TC-PKG , 969619-000
Novellus Module Controller P100, 02-034310-00
NOVELLUS 02-143079-00 ASSY, SIOC 2 SIOC, Digital Dynami
NOVELLUS 02-106217-00 REVC, ASSY, WTS-0 SIOC, CONTROLLE
NOVELLUS 02-144985-00, WTS 3 FOUP, SIOC CONTROLLER, 27
CT5004-200010-1?2 Lithius PR Upper
WJ999/1000, 815001-059 / SWITCH,PROXIMIT?Y,CAP,18MM
0021-31716, Blocker Plate, PRODUCER
AMAT 0041-27208
AXCELIS 17138730
ENTEGRIS 202-123-01 VALVE INTEGRA 1/4IN N/CHP 3GEN 2W 3
02-357829-01, ASSY, END EFFECTOR, 11.0INCH, CMPLT, FRCT
AMAT 0190-15211 XP ATM BEARING(4-PT CONTACT-BB)
NOVELLUS 11-286071-00
LAM RESEARCH 768-090914-001
APPLIED MATERIALS, MKS, 0190-01902/51A-?21440, MKS SWITC
0020-62362, Face Plate, PRODUCER
WJ999/ 1000, PLATE,BACK,VENT?,RV-FF,1500 -WPL / 2004081
Novellus 15-138414-00 BROOKS PLAT ROBOT FINGER
NOVELLUS 17-314885-00
AXCELIS BLOCK, 17270080, #2 FEM
PCB, DC MOTOR I/O, FOUP SUB 2.0
AMAT 0090-03124 ELECTRICAL ASSY BRUSH 1/2, Sensor Door
NOVELLUS 22-263229-00 O-RING
LAM RESEARCH 713-810529-001, WINDOW, SLOT V/LL
AMAT 0020-64989, BONDING PAD, FRONT RIGHT PAD, FLAT MOD
MOTOR,FAN,115V,?FFU,C3WTS, 33-328329-00, Novellus
APPLIED MATERIALS, AMAT, 0190-22279, KIT MONOVAT SEAT/V
AMAT 0020-64990, BONDING PAD, FRONT LEFT PAD FLAT MODUL
AMAT 0700-00073 INDUCTOR, 470 NANO HENRY, 300MM ACL EQU
NOVELLUS 21-106421-01, CYLINDER,CONCEN?TRIC,PLA,SPD-S
WJ999/1000, 908580-001/ PCB ASSY,INTERFACE,?INPUT/OUTPUT
AMAT 0020-24121 COVER, Front Tube, Tube Manifold
Lam Research 715-049949-001, TUBE PLUG
AXCELIS 17332500
AXCELIS 170045830
AXCELIS 17332490
AXCELIS 17332510
AXCELIS 17250360
AMAT 0090-03125
AMAT 0090-04767
AMAT Window, Small Viewport , Producer, Cover, Clear l
WJ999/ 1000, FURON DVX3-144D2, 815001-144 , SOLENOID V
MAG SEAL, EKK 5124-000009-11, EKK Working
PLATE-HOT;CT508?5-431396-13
2124-000009-11,
WATLOW, D881-AB01-1000, AMAT, 0190-24787, WATLOW D88 CO
ENTEGRIS, FLOW CONTROLLER;1350?-00242, FLOW 0-2.5LPM, 6
KTI-003-0013-1Y?, DOOR, SHIN SHUTTER
AMAT 0010-70001, Cassette Handler Assy
Hub, 200 mm, Ped Concentric Lift, 15-134732-00
ARM BELT, PSP-P3-0012-1, 023-000954-1, MBB-730
NOZZLE-ASSY, CT5085-434535-1?1
04-269057-00, TOOL KIT, C3ALT,
PIN ALUMINA,C3 DIRECT FILL, WAFER LIFT;15-300042-?00, N
LAM410 ESC-881, 839-800327-410, ESC CHUCK (CU) CLEAN
SEMES PCBB-105989
3870-06289R,VAL?VE CONTROL (CU)
PCBB-105989, BLUEICE SPIN CHUCK, SPM SPIN CHUCK
O-RING DU353TEP10;2127?-000003-11
AMAT 0190-26834 COUPLER THERMO HEATER
NDS DM3S12 / ZN, 90X007, 27-132575-00, Display, 12 in.,
AMAT 1140-00329 POWER SUPPLY, DC 24-28V, AC 100V-240V,
AMAT 3870-04305 VALVE, FUJIKIN FPR-NSDBT-21-6, 35-APY,
ENGINEERED SEMICONDUCTOR PRODUCTS, 001-05436-301, COVER
ENGINEERED 001-05452-30 Block, ESC Support, ESP ULTIMA
KOMATSU NES-3123-7, Heat Exchanger , 200050000
AMAT 0190-33293 INDICATOR, ATM, Door Position
PIN;0270-02456,?300MM ROBOT CALIBRATION 3
ENGINEERED BLOCK, 000-05471-303
SC-4G SCSI SSD, Russell_Flash HDD(SSD), AMAT T/F GROUP
MATCH/HF INPUT, ION SRC/HF, ASSY,RG393, SHORT-HF, 03-04
NOVELLUS 15-369012-00 PIN, S-5313, WN lift
SUPPORT;4QOP092?895,BASE
AMAT 0190-23606 ORING, SPLICED, BRUSH MODULE, 300mm DES
11039040R,PHASE MONITOR BOX REPAIR
AXCELIS 17270060
AMAT 0090-02522 SENSOR ASSY, Z2-AX
AMAT 0090-02521 SENSOR, LK RB Z-AXIS HOME, SENSOR ASSY
AMAT 3870-00772, PARKER SM930LP1NCS102 / 45800757, VALV
DS027-007022-1 O-RING DU353FPE01
AMAT 0041-10756R
Novellus 15-272948-00
Novellus PADDLE,300mm, Ceramic, WTS TM ROBOT, RAISED BU
NOVELLUS 11-307477-02 HOSE ASSY WATER DOME
1040495R, ENTRON PBN ESC, Working, 3month warranty
1917660R,UNCLAM?PER BELLOWS REPAIR Working condition
KOKUSAI HAITACHI CX3202 CONTROLLER
NOVELLUS SPEED LOAD LOCK ROBOT, 18-034943-00
TUBE;TEFLON_HPT?P_005 / CT5011-000014-1?1
VLSI 0326783-000, GSS O/LCS12-5S-0.20?4-3.040-5K-25, AC
NOVELLUS 38-278999-00 CABLE SENSING WATER LEAK 5FT, Tra
NOVELLUS 62-282572-00 PCB, SNNX RPC overtemp
NOVELLUS 15-373553-00 PIN-ELECTRODE, PIN, RF CONTACT, 8
RF MATCH, ASSY HIGH EFF RF-BIAS;0010-33?724
AMAT 0620-01380, CABLE ASSY, 1Meter 300V 80C RS, U5452
PLUG, CALIBRATION, VAC ROBOT,WTS
NOVELLUS 02-054573-00 MOER RING 2.4MM-14/AL2O3 300MM CE
BEAING 9INCH DUPLEX HYBIRD CERAMIC, 100-0029-01 P/N :
AMAT 001-05495-301 DOOR INNER MEGASONIC MODULE
NOVELLUS 02-054573-00 MOER RING 2.4MM-14L
VAT 211965 ACTUATOR,Overha?ul Kit, Gauge
AMAT 0041-11911 HOUSING WAFER PRESENT SENSOR VDPM, 300M
THERMOCOUPLE, Thermocouple-IR
BELT;5080-19301?6-11,LITHIUS IRA X BELT
CKD VEC-VF8-X0001, TUBE-VACUUM;211?2-000119-11-X00?01
PLATE;5010-2044?85-11
TREK POWER SUPPLY;27-29772?7-00,ESC P/S 89X4 TREK 685-L
NOVELLUS SPEED-S ESC, 02-261086-00
APPLIED MATERIALS, 0090-03913, UNIT,assy, Overtemp SW w
AMAT 0270-76245 PIN-JIG, FIXTURE, CALIBRATION, FIXTURE
KOKUSAI 2KOT025776 CIRCUIT BREAKER, ELB2132
AMAT 0020-47524 SENSOR BRACKET
SETRA 264 TRANSDUCER-PRES?SURE, 26410R1WD11T1E
SHAW-PL-BLK2, BB10-200133-11, MBB-730
LINEAR GUIDE
5085-447314-11 ADJUSTER
0020-05605, Orient Chamber Lift Hoop(8.0Inch)
APPLIED MATERIALS, AMAT, 0021-27290, ISOLATOR/RING ,002
NOVELLUS 03-252263-00 PCA VAC AWC IXT WTS-HV
AMAT 0050-90964 TUBE-GAS, UPPER NF3 WELDMENT, WELDMENT
APPLIED MATERIALS, AMAT, 0270-01156, TEST JIG, CAL Plat
SPACER, KMFA-238704
BLOCK;17270070,?1 FEM BEAM GUIDE
SMC RBQ3213 SHOCK ABSORBER, Shutter Shock, KOKUSAI 3ROT
NOVELLUS 22-273196-00,NI?CKEL, STD FL/P2113790, GLFN110
0041-04323, Gas Box(APF), PRODUCER
0010-20664, Slit valve Assy, new
FSI ACTUATOR-ROTARY?;928588-001,ASS?Y,HOT ROTA
SMC US22484, 928021-008 VALVE
FSI 930868-001
AMAT 3760-00149
SHIELD;17-15799?6-00
5085-432827-13 GAP(CUP) ASSY, JIG
AMAT 0021-26606
CONTROLLER-TEMP?ERATURE;CT5013-?000003-12 RCC-300
TREBOR 235075-002
FSI CORPORATION, 317479-002, VALVE, 317479-002, Zeta Va
FLOWMETER;30721?1-104 307211-104/4400?-04-F04-A00-A-C?41
UNIT;SERV.634.1?5811,DCDC164/34 Low V-IN, ASML
AXCELIS,TUBE 8";58700015 QUARTZFAB
AMAT 0270-03559
AMAT 0090-03407
DOOR;715-008220?-105,DOOR, BARRIER, ROCKE Anodized Alum
BLOCK;17270110,?#5 FEM BEAM GUIDE
0242-08907, 0242-08908, Wafer Slide Sensor Assy, ULTIMA
ENGINEERED SPACER, 001-09233-303,S?pacer, Ultima GSH
KOKUSAI 4RON476271 GASKET, BIO Access Panel
ST-08 GASKET, BeCu,1/8, standard force
FITTING, FLANGED 32046-QAZV, 028-014948-1, VAT,
DS027-006768-1, O-RING DU353FAE01-1-31?9, SIN NW
THK, 3760-00127, MACHINED FORGING, SLIDE RAILE
KOMATSU 5013-000040-12, PLATE, COOLING, RCP-3021,
PLATE ASSY, ADH-DSW, PLATE;CT-5085-4?31935-12,
HOLDER;1919620,?Ball Screw Wafer, BALL SCREW(19S3013)
UNIT;0010-43023?,CRESCENT ASSY, UD,DESICA, 300mm
FSI 928581-002,aasy?,ir heater mo, TUBE HEATER
AMAT, SHIELD;0020-547?77,Inner Shield (SIP),SUS
KALREZ 2-389 / AS568A
VALVE-ASSY;61-2?88740-00
DOOR;0190-31117?,LOAD LOCK DOOR ACTUATOR
OMROM 0090-05423
AMAT 0050-92816
AMAT 0200-02421
Ring, SHLD SUPPORT 1GAP PVD300, NOVELLUS, 15-154732-00
15-385384-00, RING, INSULATOR, CERAMIC, HCM TARGET,IXT
CyberOptics AVS300CL, WaferSense, Wireless Auto Vibrati
NOVELLUS SYSTEMS, 15-118122-00, SHIELD, Ring Insulator,
INNER BURNING HEATER;4TON9965?81,D3DN99658
DS2110-463342-1?1, PIPE ORV-8PS-40
19-00155-01, Heater Block,Novellus, 6inch, 150mm
NOVELLUS 27-282383-00, POWERCOM UPS KIN-1000AP RM, AC 1
CONVERTER;CT502?4-000037-11,Con?verter, SFC-M,, CT5024
000-06641-301 Centering Laser Fixtur
BELLOWS;1917660?,PLUNGER BELLOWS
FSI, SEAL KIT, 918008-004
Tubephragm Pump HPT-106-2, N2 PURGE, N2 VALVE, CT5011-0
WAFER,1840A-12-?5044A_SA,HOT CHUCK WAFER , KLA-TENCOR, S
SENSOR, KMFA-015479
Lam Research 715-007598-005 CAM, INSR, PLGR,WAP CAM, TH
NOVELLUS 60-138015-00 WINDOW INDR E/P ZNSE C3 Altus
TOKYO ELECTRON AMERICA, , MB3S10-400080-1?4, QUARTZ W
3S10-453344-11 SCREW, M5-L7-D9
AMAT 0270-02076 Bfr Xfer Robot ZERO, TOOL ZERO POSITION
AMAT 0020-17121 CONNECTOR HEATER 300MM ULTIMA
CKD EVD3500-010AP REGULATOR-AIR
AMAT 0050-90965 GAS TUBE, WELDMENT NF3 MIDDLE, INTERCON
SNT-USA, AMAT, 0200-01326, SPACER,0200-013?26(S2),S-3141
AMAT 0050-90911 HOSE, HTX LID TO CH, PRODUCER SE
ENTEGRIS 202-82-01, VALVE-INTEGRA 1/4IN NC 3GEN SAMP 1/
AMAT 0021-46440(S) BONDING PAD, PRO12, GT, LEFT
AMAT 0021-46439(S) BONDING PAD, PRO12, GT, RIGHT
SMC US22484 VALVE, 928021-007 MAX. PRESS ; 250 PSI, 1.
SHAW-PL-BLK1, BB10-200123-12, MBB-730
NOVELLUS 02-307230-00 ASM, SESIOC ALTUS 2, IPC, ALTUS S
ENTEGRIS 202-82-01-TS-B, VALVE 1/4" NC 3GEN SAMP 1/2"
CKD PMM20-8BUR-G-TC / CT5024-000327-1?1 AIR REGULATOR
SIEMENS ED43B125 Sentron Molded Case Circuit Breaker 34
FSI 444624-180
VAT 65046-PH52-AHS1 Gate Valve, 3M12-012830-11
WINDOW;2L10-350?757-11,WINDOW(Y?1-E),SHIEL
DS2112-000042-1?1 / 44-02066-01 VALVE CHECK
NOVELLUS PLUG, INDEX PLATE, ADJUSTMENT COVER 15-101236