詳細(xì)介紹
規(guī)格
類型 | BCG450 | |||
測量范圍 | 5×10-10 … 1500 | |||
精度 |
| |||
10-8 … 50 毫巴 | % of reading | ±15 | ||
50 … 950 毫巴 | % of reading | ±5 | ||
950 … 1050 毫巴 | % of reading | ±2.5 | ||
可重復(fù)性 |
| |||
10-8 … 10-2 毫巴 | % of reading | 5 | ||
熱離子發(fā)射 | mbar | 2×10-2 (high) | ||
(可選高/低,通過 RS232 / 現(xiàn)場總線) | mbar | 8×10-3 (low) | ||
除氣 (1) |
| |||
p < 7.2 × 10-6 | mbar | electron bombardment, max. 3 min | ||
壓力,更大 | bar (absolute) | 5 | ||
溫度 |
| |||
運(yùn)行(環(huán)境) | °C | 0 … +50 | ||
貯存 | °C | -20 … +70 | ||
在法蘭處烘烤 | °C | 80 | ||
移除烘烤電子設(shè)備 | °C | 150 | ||
電源電壓 | 20 … 28 | |||
輸出信號(hào)模擬 |
| |||
輸出信號(hào) | V | 0 … 10.3 | ||
測量范圍輸出 | V | 0.774 … 10.3 | ||
電壓與壓強(qiáng)之間的關(guān)系 | volts per decade | 0.75 | ||
錯(cuò)誤信號(hào) | V | 0.3 / 0.5 | ||
更小負(fù)載 | kΩ | 10 | ||
接口(數(shù)字)(2) | RS232C | |||
連接器 | D-Sub, 15-pin, male | |||
電纜長度,**大 (3) | m (ft.) | 100 (330) | ||
暴露于真空的材料 | Yt2O3, Ir, Mo, Cu, W, NiFe, NiCr, AI2O3, SnAg, stainless steel, glass | |||
內(nèi)部容積 KF / CF | cm3 (in.3) | 24 (1.46) / 34 (2.1) | ||
重量 KF / CF | g | 285 / 550 | ||
保護(hù)等級(jí) | IP30 | |||
DeviceNet™ |
| |||
協(xié)議 | DeviceNet™, group 2 slave only | |||
數(shù)據(jù)率開關(guān) | kBaud | 125, 250, 500 or network programmable | ||
電纜長度 125 kbps | m (ft.) | 500 (1650) | ||
電纜長度 250 kbps | m (ft.) | 250 (825) | ||
電纜長度 500 kbps | m (ft.) | 100 (330) | ||
MAC ID | 2 switches (address 00 - 63) or network programmable | |||
網(wǎng)絡(luò)規(guī)模 | up to 64 nodes per segment | |||
數(shù)字功能 | read pressure, select units: Torr, mbar, Pa; degas function, monitor gauge status, safe state allows definition of behavior in case of error, detailed alarm and warning information | |||
模擬功能 | 0 … 10 V analog output pressure indication, two setpoint relays A + B | |||
可視通信指示器 | LED network status (green / red) ; LED module status (green / red) | |||
技術(shù)規(guī)格 | DeviceNet™ "Vacuum Gauge Device Profile" | |||
設(shè)備類型 | ''CG'' for combination gauge | |||
I / O 從屬傳訊 | polling only | |||
設(shè)定點(diǎn)繼電器: 設(shè)定點(diǎn)數(shù)量 | 2 | |||
設(shè)定點(diǎn)繼電器: 范圍 | mbar | 1×10-9 … 1400 | ||
設(shè)定點(diǎn)繼電器: 繼電器觸點(diǎn) | n.o., potential free | |||
設(shè)定點(diǎn)繼電器: 滯后 | % of reading | 10 | ||
設(shè)定點(diǎn)繼電器: 觸點(diǎn)額定值 | 60 | |||
設(shè)定點(diǎn)繼電器: 連接器 | D-Sub, 15-pin, male | |||
DeviceNet™ 電源電壓 | 11 … 25 | |||
真空計(jì)電源電壓 | 20 … 28 | |||
DeviceNet™ 連接器 | Microstyle, 5-pin | |||
BCG(模擬輸出、電源電壓、設(shè)定點(diǎn))連接器 | D-Sub, 15-pin, male | |||
Profibus DP |
| |||
波特率 | 9.6 / 19.2 / 93.75 / 187.5 / 500 | |||
地址 | 2 switches (address 00 - 127) or network programmable | |||
數(shù)字功能 | rea, d pressure, select units: Torr, mbar, Pa; degas function, monitor gauge status, safe state allows definition of behavior in case of error, detailed alarm and warning information | |||
模擬功能 | 0 … 10 V analog output pressure indication, two setpoint relays A + B | |||
設(shè)定點(diǎn)繼電器: 設(shè)定點(diǎn)數(shù)量 | 2 | |||
設(shè)定點(diǎn)繼電器: 范圍 | mbar | 1×10-9 … 1400 | ||
設(shè)定點(diǎn)繼電器: 繼電器觸點(diǎn) | n.o., potential free | |||
設(shè)定點(diǎn)繼電器: 滯后 | % of reading | 10 | ||
設(shè)定點(diǎn)繼電器: 觸點(diǎn)額定值 | 60 | |||
Profibus DP 連接器 | D-Sub, 9-pin, female | |||
BCG(模擬輸出、電源電壓、設(shè)定點(diǎn))連接器 | D-Sub, 15-pin, male |
(1) 除氣期間降低精度
(2) 同時(shí)使用 RS232C 或 VGC40x 系列控制器,不允許使用現(xiàn)場總線
(3) 適用于 RS232C 運(yùn)行 <30m