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詳細介紹
- BX53M反射和反射/透射觀察機架
- 顯微鏡支架
- 鏡筒
- 照明器
- 光源
- 物鏡轉(zhuǎn)換器
- 滑塊
- BX53M IR觀察
- BX53M偏光觀察
- BXFM系統(tǒng)
正置金相顯微鏡BX53M產(chǎn)品介紹：
*系統(tǒng)化模塊化的設計能夠?qū)崿F(xiàn)多種配置，以滿足用戶的各種要求。
LED照明
BX53M為反射光和透射光照明提供了高強度的白光LED光源。無論強度是多少，LED都保持著一致的色溫。LED提供了高效而長壽命的照明，是材料學檢測應用的理想工具。
BX53M同時配備了一個適配器，以抬升照明器，適應更高的樣品。
| 機架組合 | 圖號 | 可用于反射光 | 可用于透射光 | 樣品高度 |
|---|---|---|---|---|
| BX53MRF-S | 1 | yes | no | 0-65 mm |
| BX53MTRF-S | 2 | yes | yes | 0-35 mm |
| BX53MRF-S + BX3M-ARMAD | 1、3 | yes | no | 40-105 mm |
| BX53MTRF-S + BX3M-ARMAD | 2、3 | yes | yes | 40-75 mm |
| FN | 類型 | 角度類型 | 圖像 | 屈光度調(diào)節(jié)裝置數(shù) | ||
|---|---|---|---|---|---|---|
| 1 | U-BI30-2 | 22 | 雙目 | 固定式 | 倒像 | 1 |
| 2 | U-TBI-3 | 22 | 雙目 | 傾斜式 | 倒像 | 1 |
| 3 | U-TR30-2 | 22 | 三目 | 固定式 | 倒像 | 1 |
| U-TR30IR | 22 | IR用三目 | 固定式 | 倒像 | 2 | |
| U-ETR-4 | 22 | 三目 | 固定式 | 正像 | 2 | |
| U-TTR-2 | 22 | 三目 | 傾斜式 | 倒像 | 2 | |
| U-SWTR-3 | 26.5 | 三目 | 固定式 | 倒像 | 2 | |
| U-SWETTR-5 | 26.5 | 三目 | 傾斜式 | 正像 | 2 | |
| U-TLU | 22 | 單口鏡筒 | — | — | — | |
| U-TLUIR | 22 | IR用單口鏡筒 | — | — | — | |
| 編碼功能 | 光源 | BF | DF | DIC | POL | IR | FL | 混合A | AS/FS | ||
|---|---|---|---|---|---|---|---|---|---|---|---|
| 1 | BX3M-RLAS-S | 3個固定式分光鏡組件位 置 | LED-內(nèi)置 | yes | yes | yes | yes | yes | yes | ||
| 2 | BX3M-URAS-S | 4個可換裝的分光鏡組件位置 | LED | yes | yes | yes | yes | yes | yes | ||
| 鹵素燈 | yes | yes | yes | yes | yes | yes | yes | ||||
| 汞燈/光導 | yes | yes | yes | yes | yes | yes | yes | ||||
| 3 | BX3M-RLA-S | LED | yes | yes | yes | yes | yes | yes | |||
| 鹵素燈 | yes | yes | yes | yes | yes | yes | yes | ||||
| 4 | BX3M-KMA-S | LED-內(nèi)置 | yes | yes | yes | yes | |||||
| 5 | BX3-ARM | 透射光觀察專用鏡臂 | |||||||||
| 6 | U-KMAS | LED | yes | yes | yes | yes | |||||
| 鹵素燈 | yes | yes | yes | yes | yes | ||||||
| 物鏡 | 放大倍率 | NA(數(shù)值孔徑) | WD（mm） | 蓋玻片厚度（mm） | 硅厚度（mm） | 分辨率(um)(孔徑光闌全開) |
|---|---|---|---|---|---|---|
| LMPLN-IR | 5X | 0.1 | 23 | 0~0.17 | _ | 6.71 |
| 10X | 0.3 | 18 | 0~0.17 | _ | 2.24 | |
| LCPLN-IR （適合FN22，不適合FN26.5） | 20X | 0.45 | 8.3 | 0~1.2 | 0~1.2 | 1.49(使用1100mm波長) |
| 50X | 0.65 | 4.5 | 0~1.2 | 0~1.2 | 1.03(使用1100mm波長) | |
| 100X | 0.85 | 1.2 | 0~0.07 | 0~1.0 | 0.79（使用1100mm波長） | |
 |  | |||||
| 無校正環(huán)物鏡觀察效果 | 有校正環(huán)物鏡觀察效果 | |||||
正置金相顯微鏡BX53M基本參數(shù)：
SPECIFICATIONS OF BX53M SUGGESTED CONFIGURATION FOR GENERAL USE
| Entry | Standard | Advanced | ||||||
| Optical system | UIS2 optical system (infinity-corrected) | ||||||||
| Main unit | Microscope frame | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/Transmitted) | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/Transmitted) | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/Transmitted) | ||
| Focus | Stroke: 25 mm Fine stroke per rotation: 100 μm Minimum graduation: 1 μm With upper limit stopper, torque adjustment for coarse handle | ||||||||
| Max. specimen height | Reflected: 65 mm (w/o spacer), 105 mm (with BX3M-ARMAD) Reflected/Transmitted: 35 mm (w/o spacer), 75 mm (with BX3M-ARMAD) | ||||||||
| Observation tube | Wide field (F.N.22) | U-TR30-2-2 Inverted: trinocular | |||||||
| Illumination | Reflected light Transmitted light | BX3M-KMA-S White LED, BF/DIC/POL/MIX FS, AS (with centering mechanism), BF/DF interlocking | BX3M-RLAS-S Coded, White LED, BF/DF/DIC/POL/MIX FS, AS (with centering mechanism), BF/DF interlocking | ||||||
| － | BX3M-LEDT White LED Abbe/long working distance condensers | － | BX3M-LEDT White LED Abbe/long working distance condensers | － | BX3M-LEDT White LED Abbe/long working distance condensers | ||||
| Revolving nosepiece | U-5RE-2 For BF: Quintuple | U-D6BDRE For BF/DF: Sextuple | U-D6BDRES-S For BF/DF : Sextuple, Coded | ||||||
| Eyepiece（F.N.22) | WHN10 WHN10X-H | ||||||||
| MIX observation | － | BX3M-CB Control box BX3M-HS Hａnd switch U-MIXR MIX slider for reflected light observation U-MIXRCBL Cable for MIXR | |||||||
| Condenser (Long working distance) | － | U-LWCD | － | U-LWCD | － | U-LWCD | |||
| Power cable | UYCP (x1) | UYCP (x2) | |||||||
| Weight | Reflected: approx.15.8 kg (microscope frame 7.4 kg) Reflected/transmitted: approx. 18.3 kg (microscope frame 7.6 kg) | ||||||||
| Objectives | MPLFLN set | MPLFLN5X, 10X, 20X, 50X, 100X BF/DIC/POL/FL observation | － | ||||||
| MPLFLN BD set | － | MPLFLN5XBD, 10XBD, BD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation | |||||||
| MPLFLN-BD, LMPLFLN-BD set | － | MPLFLN5XBD, 10XBD, LMPLFLN20XBD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation | |||||||
| Stage (X x Y) | 76 mm x 52 mm set | U-SVRM, U-MSSP Coaxial left handle stage / 76 (X) × 52 (Y) mm, with torque adjustment | |||||||
| 100 mm x 10 0mm set | U-SIC4R2, U-MSSP4 Large-size coaxial left handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis | ||||||||
| 100 mm x 100 (G) mm set | U-SIC4R2, U-MSSPG Large-size coaxial right handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis (Glass plate) | ||||||||
| 150 mm x 100 mm set | U-SIC64, U-SHG, U-SP64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis | ||||||||
| 150 mm x 100 (G) mm set | U-SIC64, U-SHG, U-SPG64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis (Glass plate) | ||||||||
| Option | MIX observation set* | BX3M-CB, BX3M-HS, U-MIXR, U-MIXRCBL | － | ||||||
| DIC* | U-DICR | ||||||||
| Intermediate Tubes | U-CA, U-EPA2, U-TRU-1-2, U-TRU | ||||||||
| Filters | U-25ND6, U-25ND25, U-25LBD, U-25LBA, U-25Y48, U-AN360-3, U-AN360P, U-PO3, U-POTP3, U-25IF550, U-25L42, U-25, U-25FR | ||||||||
| Filter for condenser | 43IF550-W45, U-POT | ||||||||
| Stage plate | U-D6BDRES-S, U-D6RE-ESD-2, U-D6BDRES-ESD, U-5RES-ESD | ||||||||
| Specimen holder | U-HRD-4, U-HLD-4, U-HRDT-4, U-HLDT-4 | ||||||||
| Handle rubber | U-SHG, U-SHGT | ||||||||
*Cannot be used with U-5RE-2.
BX53M / BXFM ESD UNITS
| Items | Microscope frame | BX53MRF-S, BX53MTRF-S |
| Illuminator | BX3M-KMA-S, BX3M-RLA-S, BX3M-URAS-S, BX3M-RLAS-S | |
| Nosepiece | U-D6BDRES-S, U-D6RE-ESD, U-D5BDREMC-ESD, U-5RES-ESD | |
| Stage | U-SIC4R2, U-SIC4L2, U-MSSP4 |
SPECIFICATIONS OF BX53M SUGGESTED CONFIGURATION FOR DEDICATED USE
| Fluorescence | Infrared | Polarized | ||||
| Optical system | UIS2 optical system (infinity-corrected) | ||||||
| Main unit | Microscope frame | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/ Transmitted) | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/Transmitted) | ||
| Focus | Stroke: 25 mm Fine stroke per rotation: 100 μm Minimum graduation: 1 μm With upper limit stopper, torque adjustment for coarse handle | ||||||
| Max. specimen height | Reflected: 65 mm (w/o spacer), 105 mm (with BX3M-ARMAD) Reflected/Transmitted: 35 mm (w/o spacer), 75 mm (with BX3M-ARMAD) | ||||||
| Observation tube | Wide field (F.N.22) | U-TR30-2 Inverted: trinocular | U-TR30IR Inverted: trinocular for IR | U-TR30-2 Inverted: trinocular | |||
| Polarized Light Intermediate Attachment (U-CPA) | Bertrａnd Lens | － | － | Focusable | |||
| Bertrａnd Field Stop | － | － | ø3.4 mm diameter (fixed) | ||||
| Engage or disengage Bertrａnd lens changeover between orthoscopic and conoscopic observation | － | － | Position of slider ● in Position of slider ○ out | ||||
| Analyzer Slot | － | － | Rotatable Analyzer with Slot (U-AN360P-2) | ||||
| Illumination | Reflected light | FL observation | BX3M-URAS-S Coded, 100 W mercury lamp, 4 position mirror unit turret, (standard: WB, WG, WU+BF etc) With FS, AS (with centering mechanism), With shutter mechanism | － | － | ||
| IR observation | － | BX3M-RLA-S 100W halogen lamp for IR, BF/IR, AS (with centering mechanism) U-LH100IR (Including 12V 10W HAL-L) 100W Halogen light source for IR TH4-100 100W power supply TH4-HS Hａnd switch U-RMT Extension cord | － | ||||
| Transmitted light | POL observation | － | － | BX3M-LEDT White LED Abbe/long working distance condensers | |||
| Revolving nosepiece | U-D6BDRES-S For BF/DF : Sextuple, Coded | U-5RE-2 For BF : Quintuple | U-P4RE Quadruple, centerable attachable components 1/4 wavelength retardation plate (U-TAD), tint plate (U-TP530) and various compensators can be attached using plate adapter (U-TAD) | ||||
| Eyepiece（F.N.22) | WHN10X | ||||||
| WHN10X-H | CROSS-WHN10X | ||||||
| Mirror units | U-FDF For BF, detectable ND filter U-FBFL For BF, built-in ND filter U-FWUS For Ultra Violet-FL U-FWBS For Blue-FL U-FWGS For Green-FL | － | |||||
| Filter / Polarizer / Analyzer | U-25FR Frost filter | U-BP1100IR/U-BP1200IR Bａnd path filters for IR | 43IF550-W45 Green filter | ||||
| U-POIR Reflected polarizer slider for IR | U-AN360IR Rotatable analyzer slider for IR | U-AN360P-2 360° Dial-rotatable Rotatable minimum angle 0.1° | |||||
| Condenser | U-LWCD Long working distance | － | U-POC-2 Achromat strain-free condenser. 360°rotatable polarizer with swing-out achromatic top-lens. Click stop at position "0°" is adjustable. NA 0.9 (top-lens in) / NA 0.18 (top-lens out) Aperture iris diaphragm: adjustable from 2 mm to 21 mm diameters | ||||
| Slider / Compensators | － | U-TAD Slider (Plate adapter) | |||||
| U-TP530 / U-TP137 Compensators | |||||||
| Power cable | UYCP (x1) | UYCP (x2) | UYCP (x1) | ||||
| Weight | Reflected: approx.15.8 kg (microscope frame 7.4 kg) | Reflected/transmitted: approx. 18.3 kg (microscope frame 7.6 kg) | Approx.18.9 kg (microscope frame 7.4 kg) | Approx.16.2 kg (microscope frame 7.6 kg) | |||
| Reflected FL light source | Light guide | U-HGLGPS, U-LLGAD, U-LLG150, SHI-130OL Light guide set | － | － | |||
| Mercury lamp | U-LH100HGAPO1-7, USH-103OL (x2), U-RFL-T, U-RCV Mercury lamp set | － | － | ||||
| Objectives | MPLFLN set | MPLFLN5X, 10X, 20X, 50X, 100X BF/DIC/POL/FL observation | － | － | |||
| MPLFLN BD set | MPLFLN5XBD, 10XBD, BD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation | － | － | ||||
| MPLFLN-BD, LMPLFLN-BD set | MPLFLN5XBD, 10XBD, LMPLFLN20XBD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation | － | － | ||||
| IR set | － | LMPLN5XIR,10XIR,LCPLN20XIR,50XIR,100XIR IR observation | － | ||||
| POL set | － | － | UPLFLN4XP,10XP,20XP,40XP POL observation | ||||
| Stage (X x Y) | 76 mm x 52 mm set | U-SVRM, U-MSSP Coaxial left handle stage / 76 (X) × 52 (Y) mm, with torque adjustment | |||||
| 100 mm x 10 0mm set | U-SIC4R2, U-MSSP4 Large-size coaxial left handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis | ||||||
| 100 mm x 100 (G) mm set | U-SIC4R2, U-MSSPG Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with lock mechanism in Y axis (Glass plate) | ||||||
| 150 mm x 100 mm set | U-SIC64, U-SHG, U-SP64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis | ||||||
| 150 mm x 100 (G) mm set | U-SIC64, U-SHG, U-SPG64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis (Glass plate) | ||||||
| POL set | － | I-SRP-1-2+U-FMP Polarizing rotatable stage + Mechanical stage | |||||
| Option | MIX observation set* | BX3M-CB, BX3M-HS, U-MIXR, U-MIXRCBL | |||||
| DIC* | U-DICR | ||||||
| Intermediate Tubes | U-CA, U-EPA2, U-TRU-1-2, U-TRU | ||||||
| Filters | U-25ND6, U-25ND25, U-25LBD, U-25LBA, U-25Y48, U-AN360-3, U-AN360P, U-PO3, U-POTP3, U-25IF550, U-25L42, U-25, U-25FR | ||||||
| Filter for condenser | 43IF550-W45, U-POT | ||||||
| Stage plate | U-WHP64, BH2-WHR43, BH2-WHR54, BH2-WHR65, U-WHP2, BH2-WHR43 | ||||||
| Specimen holder | U-HRD-4, U-HLD-4, U-HRDT-4, U-HLDT-4 | ||||||
| Handle rubber | U-SHG, U-SHGT | ||||||
*Cannot be used with U-5RE-2
正置金相顯微鏡BX53M產(chǎn)品應用：
反射光顯微鏡檢查涵蓋的應用和行業(yè)非常廣泛，下面僅選擇了使用不同觀察方法效果的部分示例。 |  |
| 暗場觀察表面貼裝基板：DF 暗場能夠觀察標本上的散射或衍射光。任何不平整的部位都會反射這種光，而平整的部位則顯得很暗，因此缺陷部位就會清晰地顯示出來。用戶甚至可以識別出極細微的劃痕，或小到8nm級別的缺陷 – 比光學顯微鏡的分辨能力還要小。 因此，暗場是檢測標本上細微劃痕或缺陷，以及鏡面標本（包括晶圓）的理想工具。 | 微分干涉觀察球墨鑄鐵檢測：DIC 微分干涉是一種顯微鏡觀察技術(shù)，這種技術(shù)把明場觀察所不能檢測到的標本高度差，變?yōu)楦〉駹罨蛉S圖像，改善了圖像襯度。該技術(shù)使用了偏光，并有三種專門定制設計的棱鏡可以選擇。它是檢查具有極細微高度差的標本的理想工具，包括金相組織、礦石、磁頭、硬盤介質(zhì)和拋光晶圓表面。 |
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| 熒光觀察半導體晶圓上的顆粒異物：FL 該技術(shù)用于通過專用濾色片激發(fā)塊照明，使標本能夠發(fā)出熒光（發(fā)出不同波長的光），特定的激發(fā)塊可用于特定的應用。它適合于檢查半導體晶圓上的異物、光阻殘留物，以及通過熒光染料檢測裂縫?？梢赃x配復消色差集光鏡系統(tǒng)的燈箱，以補償從可見光到近紅外光的色差。 | 紅外光觀察電極切片：IR IR觀察是非破壞性地檢查可以透過紅外光的硅材料或玻璃材料構(gòu)成的電子元器件內(nèi)部的方法。 |
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| 透射光觀察LCD彩色濾光片：TLBF+HDR 對于透明樣品，比如LCD、塑料和玻璃材料，可以使用各種聚光鏡進行透射光觀察。組建一個光學系統(tǒng)，實現(xiàn)透射光明場和偏光進行樣品檢查非常方便。 | |
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