吉時(shí)利5位半6517B靜電計(jì)/高阻表提供的精 度和靈敏度指標(biāo)高于其他同類型儀表。它還具有 完備的功能，使測(cè)量高阻和絕緣材料電阻率變得 簡(jiǎn)單。6517B具有425讀數(shù)/秒的測(cè)試速率，比同 類型的靜電計(jì)快很多，可以提供快速、簡(jiǎn)易的弱 電流測(cè)量能力測(cè)量弱電流。
主要特點(diǎn):
電阻測(cè)量可達(dá)1016 Ω
電流測(cè)量范圍1fA - 20mA
最小電流量程輸入端壓降<20μV
200TΩ 輸入阻抗
<3fA 偏置電流
測(cè)試速率高達(dá)425 rdgs/s
噪聲0.75fA p-p
內(nèi)置±1kV電壓源
的高電阻測(cè)量電壓反接方法
可選的插件式掃描卡
出眾的性能指標(biāo)
半機(jī)架型6517B靜電計(jì)/高阻表具有特殊的低 電流輸入放大器，其輸入偏置電流<3fA，噪聲僅 0.75fA p-p (峰-峰) ，輸入端壓降<20μV。對(duì)于 接近理想的電路負(fù)載，其電壓和電阻測(cè)量的輸入 阻抗是200TΩ。這些性能指標(biāo)確保物理、光學(xué)、納米技術(shù)和材料科學(xué)等研究領(lǐng)域低電流和高阻抗電壓、電阻和電荷測(cè)量所需的準(zhǔn)確 度和靈敏度。內(nèi)置±1kV的電壓源具有掃描能力，從而簡(jiǎn)化漏流測(cè)試、擊穿電壓測(cè)試 和電阻測(cè)試，以及絕緣材料的體電阻率(Ω-cm) 及表面電阻率(Ω/square) 的測(cè)量。
測(cè)量范圍寬
6517B型靜電計(jì)/高阻表具有全自動(dòng)量程，超過電流、電阻、電壓和電荷測(cè)量滿量程：
? 電流測(cè)量范圍：1fA - 20mA
? 電壓測(cè)量范圍：10μV - 200V
? 電阻測(cè)量范圍：50Ω - 1016Ω
? 電荷測(cè)量范圍：10fC - 2μC
改進(jìn)的高靈敏度測(cè)量
許多測(cè)試應(yīng)用要求測(cè)量高級(jí)別材料的電阻率（面電阻率和體電阻率）。傳統(tǒng)測(cè) 量方法是對(duì)樣本施加足夠高的電壓，測(cè)量流經(jīng)樣本的電流，然后利用歐姆定律(R=V /I)計(jì)算其電阻。雖然高阻材料和器件產(chǎn)生很小的電流，很難準(zhǔn)確進(jìn)行測(cè)量，但利用 吉時(shí)利靜電計(jì)和皮安計(jì)則可以成功地進(jìn)行這種測(cè)量。
即使利用高精度儀器，材料中固有的背景電流使得進(jìn)行準(zhǔn)確測(cè)量較為 困難。由于壓電效應(yīng)、電容效應(yīng)和偏振效應(yīng)，絕緣材料、聚合物和塑料通 常都顯示出背景電流。這些背景電流一般等于或大于施加電壓產(chǎn)生的電流。 在這些情況下，其測(cè)量結(jié)果往往是不穩(wěn)定的，生成不準(zhǔn)確的電阻或電阻率 讀數(shù)甚至錯(cuò)誤的負(fù)值。吉時(shí)利6517B型靜電計(jì)/高阻表旨在解決這些問題， 并為各種材料和元件提供一致、可重復(fù)和精準(zhǔn)的測(cè)量，特別是與8009型電 阻測(cè)試夾具一起使用時(shí)。
The 6430 sub-fa programmed source meter integrates the voltage and current sources and measuring functions of the gishli source meter and the source measurement unit (SMU) products, with higher sensitivity, lower noise and higher input impedance than the electrometer. This unique performance is achieved with the 6430 remote preamplifier, which provides a very sensitive bidirectional amplifier for measuring or producing the current of the device under test. The high level signal from the remote preamplifier is sent to the control unit via a 2 m long cable. This allows the user to connect directly, or closely, to the signal, reducing the impact of cable noise.
Main features:
0.4fA p-p (4e-16a) noise
The remote preamplifier can be located at the source to reduce cable noise
> 1016 Ω input impedance voltage measurements
High speed -- up to 2000 readings per second
The resolution is 6 and a half bits
Fast component feature analysis with programmable digital I/O and interface
Measure the voltage, current, and resistance at a speed that the electrometer cannot reach. It can read up to 2000 source/measurement readings per second and read them into internal memory. It can measure fast and small current. The 100nA range can respond to the signal as short as 5ms, while the larger range can respond to the signal of several hundred microseconds.
The unique features of the 6430 include its excellent low current sensitivity and remote preamplifier, which provides sensitivity by avoiding long input cables. The remote preamplifier is the main part of the 6430 feedback measurement system. Although it can be separated from the main machine by a connection cable of up to 2 meters with a high level signal, it cannot work independently of the main machine.
application
The functions of the 6430 make it equally suitable for research work in test laboratories and evaluation of complex components, as well as for combining other source measuring instruments or smus for low current, high resistance or high sensitivity semi-conductor measurements at high levels. The low noise and drift properties of 6430 are also suitable for the study of high resistivity nanowires and other high resistivity nanomaterials.
High speed data processing
6430 can read to its memory buffer at over 2000 readouts per second. The ieee-488 bus output can send up to 75 source/measurement readings per second to the external computer controller, including through/failure indication.
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